Semiconductor device including multi-stack structure

ABSTRACT

A semiconductor device includes a substrate having a cell region and a connection region adjacent to the cell region. A lower stack structure and an upper stack structure are disposed on the substrate. A channel structure is provided to pass through the upper stack structure and the lower stack structure. A distance between a lower extension line portion included in an uppermost one of a plurality of lower interconnection layers and an upper extension line portion included in a lowermost one of a plurality of upper interconnection layers is less than a distance between a lower gate electrode portion included in the uppermost one of the plurality of lower interconnection layers and an upper gate electrode portion included in the lowermost one of the plurality of upper interconnection layers.

CROSS-REFERENCE TO RELATED APPLICATION

This U.S. non-provisional patent application claims priority under 35U.S.C. § 119 to and the benefit of Korean Patent Application No.10-2018-0112039, filed on Sep. 19, 2018, in the Korean IntellectualProperty Office (KIPO), the disclosure of which is incorporated hereinby reference in its entirety.

BACKGROUND 1. Field

Example embodiments of the inventive concepts relate to relate tosemiconductor devices having a multi-stack structure and/or methods offorming the same.

2. Description of Related Art

A technique using a multi-stack structure has been used to increase anintegration density of semiconductor devices. A channel structure may bedisposed to pass through the multi-stack structure. The multi-stackstructure may include a plurality of insulating layers and a pluralityof interconnection layers that are alternately stacked on each other.Each of the plurality of interconnection layers may include a padportion. Due to an increase in the number of the plurality ofinterconnection layers that are vertically stacked, a process of formingthe pad portion is becoming complicated and difficult.

SUMMARY

Some example embodiments of the inventive concepts are directed toproviding semiconductor devices, which provide an increase inintegration density and has improved electrical characteristics, and/ormethods of forming the same.

According to an example embodiment, a semiconductor device may include asubstrate having a cell region and a connection region adjacent to thecell region, a lower stack structure including a plurality of lowerinsulating layers and a plurality of lower interconnection layers, theplurality of lower insulating layers and the plurality of lowerinterconnection layers being alternately stacked on each other on thesubstrate, each of the plurality of lower interconnection layersincluding a lower gate electrode portion in the cell region and a lowerextension line portion in the connection region, the lower extensionline portion extending from the lower gate electrode portion, an upperstack structure including a plurality of upper insulating layers and aplurality of upper interconnection layers, the plurality of upperinsulating layers and the plurality of upper interconnection layersbeing alternately stacked on each other on the lower stack structure,each of the plurality of upper interconnection layers including an uppergate electrode portion in the cell region and an upper extension lineportion in the connection region, the upper extension line portionextending from the upper gate electrode portion, and a channel structurepassing through the upper stack structure and the lower stack structure.A first distance between the lower extension line portion included in anuppermost one of the plurality of lower interconnection layers and theupper extension line portion included in a lowermost one of theplurality of upper interconnection layers may be less than a seconddistance between the lower gate electrode portion included in theuppermost one of the plurality of lower interconnection layers and theupper gate electrode portion included in the lowermost one of theplurality of upper interconnection layers.

According to an example embodiment, a semiconductor device may include asubstrate having a cell region and a connection region adjacent to thecell region, a lower stack structure including a plurality of lowerinsulating layers and a plurality of lower interconnection layersalternately stacked on each other on the substrate, each of theplurality of lower interconnection layers including a lower electrodeportion in the cell region and a lower extension line portion in theconnection region, the lower extension line portion extending from thelower electrode portion, an upper stack structure including a pluralityof upper insulating layers and a plurality of upper interconnectionlayers alternately stacked on each other on the lower stack structure,each of the plurality of upper interconnection layers including, anupper electrode portion in the cell region and an upper extension lineportion in the connection region, the upper extension line portionextending from the upper electrode portion, and a channel structurepassing through the upper stack structure and the lower stack structure.At least one of the lower extension line portion of an uppermost one ofthe plurality of lower interconnection layers or the upper extensionline portion of the lowermost one of the plurality of upperinterconnection layers may include a first inclined region near the cellregion.

According to an example embodiment, a semiconductor device may include asubstrate having a cell region and a connection region adjacent to thecell region, a plurality of extension lines in the connection region,the plurality of extension lines sequentially stacked on the substrate,a plurality of gate electrodes in the cell region, the plurality of gateelectrodes sequentially stacked on the substrate, the plurality of gateelectrodes connected to corresponding ones of the plurality of extensionlines, respectively, to form a plurality of interconnection layers, aplurality of insulating layers being alternatively between the pluralityof interconnection layers, first distances between pairs of twoneighboring ones of the plurality of extension lines are substantiallyequal to each other, and at least one of distances between pairs of twoneighboring ones of the plurality of gate electrodes is greater than thefirst distances, and a channel structure passing through the pluralityof gate electrodes.

According to an example embodiment, a semiconductor device may include asubstrate having a cell region and a connection region adjacent to thecell region, a lower stack structure including a plurality of lowerinsulating layers and a plurality of lower interconnection layers, theplurality of lower insulating layers and the plurality of lowerinterconnection layers alternately stacked on each other on thesubstrate, each of the plurality of lower interconnection layersincluding a lower gate electrode portion in the cell region and a lowerextension line portion in the connection region and extending from thelower gate electrode portion, an upper stack structure including aplurality of upper insulating layers and a plurality of upperinterconnection layers, the plurality of upper insulating layers and theplurality of upper interconnection layers alternately stacked on eachother on the lower stack structure, each of the plurality of upperinterconnection layers including an upper gate electrode portion in thecell region and an upper extension line portion in the connection regionand extending from the upper gate electrode portion, a channel structurepassing through the upper stack structure and the lower stack structure,and at least one middle spacer structure in the connection region, themiddle spacer structure including a dummy interconnection layer, thedummy interconnection layer including at least one dummy extension lineportion, the at least one dummy extension line portion being between theupper stack structure and the lower stack structure, the middle spacerstructure being in contact with a side surface of at least one of theplurality of lower insulating layers or the plurality of upperinsulating layers, a first distance between lower extension lineportions of two neighboring ones of the plurality of lowerinterconnection layers, a thickness of the dummy extension line portion,and a second distance between upper extension line portions of twoneighboring ones of the plurality of upper interconnection layers aresubstantially equal to each other.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view illustrating a semiconductor deviceaccording to an example embodiment of the inventive concepts.

FIG. 2 is a plan view layout illustrating a semiconductor deviceaccording to an example embodiment of the inventive concepts.

FIGS. 3 to 8 are partial enlarged views of corresponding portions ofFIG. 1.

FIGS. 9 to 15 are cross-sectional views illustrating semiconductordevices according to some example embodiments of the inventive concepts.

FIGS. 16 to 18 and 25 to 42 are cross-sectional views illustrating amethod of forming a semiconductor device according to an exampleembodiment of the inventive concepts.

FIGS. 19 to 24 are partial views of a portion of FIG. 18 for explainingin detail the process illustrated FIG. 18.

DETAILED DESCRIPTION

While the term “same” or “equal” is used in description of exampleembodiments, it should be understood that some imprecisions may exist.Thus, when one element is referred to as being the same as anotherelement, it should be understood that an element or a value is the sameas another element within a desired manufacturing or operationaltolerance range (e.g., ±10%).

When the terms “about” or “substantially (equal or same)” are used inthis specification in connection with a numerical value, it is intendedthat the associated numerical value includes a manufacturing oroperational tolerance (e.g., ±10%) around the stated numerical value.Moreover, when the words “generally” and “substantially” are used inconnection with geometric shapes, it is intended that precision of thegeometric shape is not required but that latitude for the shape iswithin the scope of the disclosure.

It will be understood that, although the terms first, second, third etc.may be used herein to describe various elements, components, regions,layers and/or sections, these elements, components, regions, layersand/or sections should not be limited by these terms. These terms areonly used to distinguish one element, component, region, layer orsection from another region, layer or section. Thus, a first element,component, region, layer or section discussed below could be termed asecond element, component, region, layer or section without departingfrom the teachings of example embodiments.

FIG. 1 is a cross-sectional view illustrating a semiconductor deviceaccording to an example embodiment of the inventive concepts. FIG. 2 isa plan view layout illustrating a semiconductor device according to anexample embodiment of the inventive concepts. FIG. 1 may be across-sectional view taken along line I-I′ of FIG. 2. FIGS. 3 to 8 arepartial enlarged views of corresponding portions of FIG. 1. Thesemiconductor device according to some example embodiments of theinventive concepts may include a non-volatile memory (e.g., a verticalNAND (VNAND) or three-dimensional (3D) flash memory). The semiconductordevice according to the some example embodiments of the inventiveconcepts may adopt a cell-on-peripheral (COP) structure.

Referring to FIG. 1, the semiconductor device according to the anexample embodiment may include a substrate 21, a device isolation layer23, a plurality of transistors 25, a first insulating layer 27, aplurality of peripheral circuit interconnections 29, a lower buriedconductive layer 31, a second insulating layer 32, a middle buriedconductive layer 33, a source mold layer 34, a replacement conductiveline 35, a support plate 37, a third insulating layer 38, a fourthinsulating layer 41, a fifth insulating layer 43, a lower stackstructure 50, an upper stack structure 70, a plurality of lower channelholes 89H1, a plurality of upper channel holes 89H2, a plurality ofchannel structures 89, a plurality of cell contact plugs 91, a pluralityof bit plugs 93, a plurality of upper circuit interconnections 95, aplurality of bit lines 97, and lower spacers 113.

The substrate 21 may include a cell region CE and a connection region EXadjacent to the cell region CE. The connection region EX may becontinuous with the cell region CE. The lower stack structure 50 mayinclude a plurality of lower insulating layers LIL1, LIL2, and LILN anda plurality of lower interconnection layers LCL1, LCL2, and LCLN, whichare alternately stacked on each other. Each of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN may include a lower gateelectrode portion LG, a lower extension line portion LE, and a lower padportion LP. The lower extension line portion LE may be connected betweenthe lower gate electrode portion LG and the lower pad portion LP. Theupper stack structure 70 may include a plurality of upper insulatinglayers UIL1, UIL2, and UILN and a plurality of upper interconnectionlayers UCL1, UCL2, and UCLN, which are alternately stacked on eachother. Each of the plurality of upper interconnection layers UCL1, UCL2,and UCLN may include an upper gate electrode portion UG, an upperextension line portion UE, and an upper pad portion UP. The upperextension line portion UE may be connected between the upper gateelectrode portion UG and the upper pad portion UP. Each of the pluralityof channel structures 89 may include an information storage pattern 85,a channel pattern 86, a core pattern 87, and a bit pad 88.

In an example embodiment, the replacement conductive line 35 maycorrespond to a common source line (CSL). Some of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN, which are adjacent to abottom end of the lower stack structure 50, may correspond togate-induced drain leakage (GIDL) control lines, ground selection lines(GSLs), or source selection lines (SSLs). Some of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN and the plurality of upperinterconnection layers UCL1, UCL2, and UCLN may correspond to wordlines. Some of the plurality of upper interconnection layers UCL1, UCL2,and UCLN, which are adjacent to a top end of the upper stack structure70, may correspond to GIDL control lines, string selection lines (SSLs),or drain selection lines (DSLs).

Referring to FIG. 2, the semiconductor device according to an exampleembodiment may include a cell region CE, a connection region EX, aplurality of isolation trenches 46, a selection line isolation pattern47, a lower stack structure 50, an upper stack structure 70, a pluralityof channel structures 89, and a plurality of cell contact plugs 91.

The lower stack structure 50 and the upper stack structure 70 may bedefined between the plurality of isolation trenches 46. The selectionline isolation pattern 47 may be disposed between the plurality ofisolation trenches 46. The selection line isolation pattern 47 may crossthe cell region CE and extend into the connection region EX. In anexample embodiment, the plurality of isolation trenches 46 may serve asword line cut patterns.

FIG. 3 is a partial enlarged view of a portion III of FIG. 1. Referringto FIG. 3, the lower spacer 113 may include an inclined side surfaceformed adjacent to a boundary between the cell region CE and theconnection region EX. A straight line passing through an upper end(e.g., a top end or an upper corner) and a lower end (e.g., a lowercorner) of the lower spacer 113 may form a first inclination angle θ1with respect to a horizontal line in parallel with a surface of thesubstrate 21. The first inclination angle θ1 may be 60° or less (e.g.,an angle between 1° to 60°). For example, the first inclination angle θ1may be about 45°.

FIG. 4 is a partial enlarged view of the portion III of FIG. 1.Referring to FIG. 4, the side surface of the lower spacer 113 may beformed to have a staircase shape.

FIG. 5 is a partial enlarged view of the portion III of FIG. 1.Referring to FIG. 5, the side surface of the lower spacer 113 may beformed to have a gently curved surface, which includes one or moreinflection points.

FIG. 6 is a partial enlarged view of the portion VI of FIG. 1. Referringto FIG. 6, the source mold layer 34 may include a lower source moldlayer 34A, a middle source mold layer 34M, and an upper source moldlayer 34B, which are sequentially stacked. In an example embodiment, thelower source mold layer 34A may include silicon oxide, the middle sourcemold layer 34M may include silicon nitride, and the upper source moldlayer 34B may include silicon oxide.

FIG. 7 is a partial enlarged view of the portion VII of FIG. 1.Referring to FIG. 7, the information storage pattern 85 may include atunnel insulating layer 82, a charge storage layer 83, and a blockinglayer 84. The blocking layer 84 may surround the outside of the chargestorage layer 83. The blocking layer 84 may be a single layer or amultilayered structure. The core pattern 87 may be an insulating layer(e.g., silicon oxide) or a semiconductor layer (e.g., polysilicon). Thechannel pattern 86 may include a semiconductor layer (e.g.,polysilicon). The tunnel insulating layer 82 may include an insulatinglayer (e.g., silicon oxide). The charge storage layer 83 may includesilicon nitride. The blocking layer 84 may include silicon oxide, ametal oxide, or a combination thereof.

FIG. 8 is a partial enlarged view of the portion VIII of FIG. 1.Referring to FIG. 8, the lower pad portion LP, which is continuous with(or extended from) one end of the lower extension line portion LE, mayinclude the same conductive material as the lower extension line portionLE. As shown in FIG. 8, in some example embodiments, a thickness of thelower pad portion LP may be relatively greater than that of the lowerextension line portion LE. Bottom surfaces of the lower pad portion LPand the lower extension line portion LE may be substantially coplanarwith each other. The upper extension line portion UE and the upper padportion UP may exhibit shapes similar to those of the lower extensionline portion LE and the lower pad portion LP. Each of a top surface ofthe lower pad portion LP and a top surface of the upper pad portion UPmay be above each of a top surface of the lower extension line portionLE and a top surface of the upper extension line portion, therebyforming respective raised pads.

Referring back to FIGS. 1 to 8, the substrate 21 may include asemiconductor substrate (e.g., a silicon wafer). The device isolationlayer 23 may include an insulating layer formed using a shallow trenchisolation (STI) process. The device isolation layer 23 may includesilicon oxide, silicon nitride, silicon oxynitride, siliconoxycarbonitride (SiOCN), or a combination thereof. The plurality oftransistors 25 may include a fin-type field-effect transistor (finFET),a multi-bridge channel transistor, a nanowire transistor, a verticaltransistor, a recess channel transistor, a 3D transistor, a planartransistor, or a combination thereof. The plurality of peripheralcircuit interconnections 29 may include horizontal interconnections andvertical interconnections having various shapes. The plurality ofperipheral circuit interconnections 29 may include a metal, a metalnitride, a metal oxide, a metal silicide, polysilicon, conductivecarbon, or a combination thereof. The plurality of peripheral circuitinterconnections 29 may be connected to the plurality of transistors 25.

The first insulating layer 27 may cover the device isolation layer 23,the plurality of transistors 25, and the plurality of peripheral circuitinterconnections 29. Each of the first insulating layer 27, the secondinsulating layer 32, the third insulating layer 38, the fourthinsulating layer 41, and the fifth insulating layer 43 may includesilicon oxide, silicon nitride, silicon oxynitride, siliconoxycarbonitride (SiOCN), a low-k dielectric material, a high-kdielectric material, or a combination thereof.

The lower buried conductive layer 31 may be disposed in the cell regionCE. The second insulating layer 32 may be disposed in the connectionregion EX. The lower buried conductive layer 31 and the secondinsulating layer 32 may be provided on a same plane. The lower buriedconductive layer 31 may be electrically connected to at least acorresponding one of the plurality of peripheral circuitinterconnections 29. The lower buried conductive layer 31 may include ametal, a metal nitride, a metal oxide, a metal silicide, polysilicon,conductive carbon, or a combination thereof.

The middle buried conductive layer 33 may be formed on the lower buriedconductive layer 31. The middle buried conductive layer 33 may include asemiconductor layer (e.g., polysilicon including N-type impurities). Thereplacement conductive line 35 and the source mold layer 34 may bedisposed on the middle buried conductive layer 33. The replacementconductive line 35 may include a metal, a metal nitride, a metal oxide,a metal silicide, polysilicon, conductive carbon, or a combinationthereof. In an example embodiment, the replacement conductive line 35may include a semiconductor layer (e.g., polysilicon including N-typeimpurities). The replacement conductive line 35 may pass through theinformation storage pattern 85 and be in direct contact with a sidesurface of the channel pattern 86. The support plate 37 may be disposedon the replacement conductive line 35 and the source mold layer 34. Thesupport plate 37 may include a semiconductor layer (e.g., polysilicon).

The third insulating layer 38 may be formed on the second insulatinglayer 32. The support plate 37 may cover the cell region CE andpartially extend to the connection region EX. The third insulating layer38 may be disposed in the connection region EX. Top surfaces of thethird insulating layer 38 and the support plate 37 may be substantiallycoplanar with each other.

The lower spacer 113 may be disposed on the substrate 21 in theconnection region EX. In an example embodiment, the lower spacer 113 maybe disposed between the lower stack structure 50 and the thirdinsulating layer 38. The lower spacer 113 may partially extend betweenthe lower stack structure 50 and the support plate 37. The lower spacer113 may exhibit various profiles as described with reference to FIGS. 3to 5. The plurality of lower interconnection layers LCL1, LCL2, and LCLNmay be formed to have relatively uniform thicknesses due to the inclinedside surface of the lower spacer 113.

The lower stack structure 50 may be disposed on the support plate 37 andthe lower spacer 113. A lowermost layer LIL1 of the plurality of lowerinsulating layers LIL1, LIL2, and LILN may be in direct contact with thesupport plate 37 and the lower spacer 113. The lower gate electrodeportions LG may be disposed in the cell region CE. The lower padportions LP may be disposed in the connection region EX. The lowerextension line portions LE may be disposed in the connection region EXbetween the lower gate electrode portions LG and the lower pad portionsLP. The lower extension line portions LE and the lower pad portions LPmay overlap the lower spacer 113.

Each of the lower extension line portions LE may be disposed at a higherlevel than a corresponding one of the lower gate electrode portions LG.A bottom surface of each of the lower extension line portions LE may bedisposed at a higher level than a bottom surface of the correspondingone of the lower gate electrode portions LG. A bottom surface of each ofthe lower pad portions LP may be disposed at substantially the samelevel as the bottom surface of the corresponding one of the lowerextension line portions LE.

An uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may be disposed in the cell region CE and partiallyextend in the connection region EX. A top surface of the uppermost layerLILN of the plurality of lower insulating layers LIL1, LIL2, and LILNmay be substantially coplanar with a top surface of the lower extensionline portion LE included in an uppermost layer LCLN of the plurality oflower interconnection layers LCL1, LCL2, and LCLN.

The upper stack structure 70 may be disposed on the lower stackstructure 50. A lowermost layer UIL1 of the plurality of upperinsulating layers UIL1, UIL2, and UILN may be in direct contact with theuppermost layer LILN of the plurality of lower insulating layers LIL1,LIL2, and LILN and the uppermost layer LCLN of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN. The lowermost layer UIL1 ofthe plurality of upper insulating layers UIL1, UIL2, and UILN may be indirect contact with the top surface of the lower extension line portionLE included in the uppermost layer LCLN of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN.

The upper gate electrode portions UG may be disposed in the cell regionCE. The upper pad portions UP may be disposed in the connection regionEX. The upper extension line portions UE may be disposed in theconnection region EX between the upper gate electrode portions UG andthe upper pad portions UP. Each of the upper extension line portions UEmay be disposed at the same level as a corresponding one of the uppergate electrode portions UG. A bottom surface of each of the upper padportions UP may be disposed at the same level as the bottom surface ofthe corresponding one of the upper extension line portions UE.

The lower pad portions LP and the upper pad portions UP may beoffset-aligned with each other in the connection region EX. The lowerpad portions LP and the upper pad portions UP may exhibit a staircaseform. The fourth insulating layer 41 may cover the lower pad portions LPand the upper pad portions UP.

In the cell region CE, the plurality of lower channel holes 89H1 may bedisposed to pass through the lower stack structure 50, the support plate37, and the replacement conductive line 35. In the cell region CE, theplurality of upper channel holes 89H2 may be disposed to pass throughthe upper stack structure 70 and communicatively coupled to or connectedwith the plurality of lower channel holes 89H1. The plurality of channelstructures 89 may be formed inside the plurality of lower channel holes89H1 and the plurality of upper channel holes 89H2.

Boundaries between the plurality of lower channel holes 89H1 and theplurality of upper channel holes 89H2 may be substantially coplanar witha boundary between the lower stack structure 50 and the upper stackstructure 70. A boundary between the lower extension line portion LEincluded in the uppermost layer LCLN of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN and the lowermost layer UIL1of the plurality of upper insulating layers UIL1, UIL2, and UILN, aboundary between the uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN and the lowermost layer UIL1 ofthe plurality of upper insulating layers UIL1, UIL2, and UILN, and theboundaries between the plurality of lower channel holes 89H1 and theplurality of upper channel holes 89H2 may be substantially coplanar witheach other.

The fifth insulating layer 43 may be disposed on the upper stackstructure 70 and the fourth insulating layer 41. The plurality of cellcontact plugs 91 may be disposed to pass through the fifth insulatinglayer 43 and the fourth insulating layer 41 and be in contact with thelower pad portions LP and the upper pad portions UP. The plurality ofbit plugs 93 may be disposed to pass through the fifth insulating layer43 and be in contact with the bit pads 88. The plurality of uppercircuit interconnections 95 and the plurality of bit lines 97 may beformed on the fifth insulating layer 43. The plurality of upper circuitinterconnections 95 may be in contact with the plurality of cell contactplugs 91. The plurality of bit lines 97 may be in contact with theplurality of bit plugs 93. Each of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN, the plurality of upperinterconnection layers UCL1, UCL2, and UCLN, the plurality of cellcontact plugs 91, the plurality of bit plugs 93, the plurality of uppercircuit interconnections 95, and the plurality of bit lines 97 mayinclude a conductive layer (e.g., a metal, a metal silicide, a metalnitride, a metal oxide, conductive carbon, polysilicon, or a combinationthereof).

The uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may be thicker than each of other layers LIL1 andLIL2. In the cell region CE, a distance between the uppermost layer LCLNof the plurality of lower interconnection layers LCL1, LCL2, and LCLNand a lowermost layer UCL1 of the plurality of upper interconnectionlayers UCL1, UCL2, and UCLN may be greater than each of distancesbetween the plurality of lower interconnection layers LCL1, LCL2, andLCLN and each of distances between the plurality of upperinterconnection layers UCL1, UCL2, and UCLN. In the connection regionEX, each of the distances between the plurality of lower interconnectionlayers LCL1, LCL2, and LCLN, each of the distances between the pluralityof upper interconnection layers UCL1, UCL2, and UCLN, and a distancebetween the uppermost layer LCLN of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN and the lowermost layer UCL1of the plurality of upper interconnection layers UCL1, UCL2, and UCLNmay be equal to each other.

In an example embodiment, a distance between the lower extension lineportion LE included in the uppermost layer LCLN of the plurality oflower interconnection layers LCL1, LCL2, and LCLN and the upperextension line portion UE included in the lowermost layer UCL1 of theplurality of upper interconnection layers UCL1, UCL2, and UCLN may beless than a distance between the lower gate electrode portion LGincluded in the uppermost layer LCLN of the plurality of lowerinterconnection layers LCL1, LCL2, and LCLN and the upper gate electrodeportion UG included in the lowermost layer UCL1 of the plurality ofupper interconnection layers UCL1, UCL2, and UCLN. Each of distancesbetween the lower extension line portions LE, each of distances betweenthe upper extension line portions UE, and the distance between the lowerextension line portion LE included in the uppermost layer LCLN of theplurality of lower interconnection layers LCL1, LCL2, and LCLN and theupper extension line portion UE included in the lowermost layer UCL1 ofthe plurality of upper interconnection layers UCL1, UCL2, and UCLN maybe substantially equal to each other.

In an example embodiment, a distance between the upper gate electrodeportions UG may be substantially equal to a distance between the lowergate electrode portions LG. A distance between the lower gate electrodeportion LG included in the uppermost layer LCLN of the plurality oflower interconnection layers LCL1, LCL2, and LCLN and the upper gateelectrode portion UG included in the lowermost layer UCL1 of theplurality of upper interconnection layers UCL1, UCL2, and UCLN may begreater than the distance between the lower gate electrode portions LG.

In an example embodiment, the plurality of lower insulating layers LIL1,LIL2, and LILN and the plurality of upper insulating layers UIL1, UIL2,and UILN may be interpreted as a plurality of insulating layers LIL1,LIL2, LILN, UIL1, UIL2, and UILN. The plurality of lower interconnectionlayers LCL1, LCL2, and LCLN and the plurality of upper interconnectionlayers UCL1, UCL2, and UCLN may be interpreted as a plurality ofinterconnection layers LCL1, LCL2, LCLN, UCL1, UCL2, and UCLN. The lowergate electrode portions LG and the upper gate electrode portions UG maybe interpreted as a plurality of gate electrode portions LG and UG. Thelower extension line portions LE and the upper extension line portionsUE may be interpreted as a plurality of extension line portions LE andUE. The lower pad portions LP and the upper pad portions UP may beinterpreted as a plurality of pad portions LP and UP.

The plurality of channel structures 89 may pass through the plurality ofinsulating layers LIL1, LIL2, LILN, UIL1, UIL2, and UILN and theplurality of gate electrode portions LG and UG. Distances between theplurality of extension line portions LE and UE may be substantiallyequal to each other. At least one of the distances between the pluralityof gate electrode portions LG and UG may be greater than each of thedistances between the plurality of extension line portions LE and UE. Atleast one of the plurality of insulating layers LIL1, LIL2, LILN, UIL1,UIL2, and UILN, which may be adjacent to a boundary between the lowerchannel hole 89H1 and the upper channel hole 89H2, may have a thicknessgreater than the distance between the plurality of extension lineportions LE and UE.

FIGS. 9 to 15 are cross-sectional views of semiconductor devices takenalong line I-I′ of FIG. 2, illustrating a semiconductor device accordingto some example embodiments of the inventive concepts.

Referring to FIG. 9, a source mold layer 34 and a replacement conductiveline 35 may be disposed on a substrate 21. A support plate 37 may bedisposed on the source mold layer 34 and the replacement conductive line35. A plurality of channel structures 89 may pass through an upper stackstructure 70, a lower stack structure 50, the support plate 37, and thereplacement conductive line 35.

Referring to FIG. 10, a source mold layer 34, a replacement conductiveline 35, and a third insulating layer 38 may be disposed on thesubstrate 21. A support plate 37 may be disposed on the source moldlayer 34 and the replacement conductive line 35. Side surfaces of thesupport plate 37 and the source mold layer 34 may be in contact with aside surface of the third insulating layer 38.

Referring to FIG. 11, a thickness of an uppermost layer LILN of aplurality of lower insulating layers LIL1, LIL2, and LILN may berelatively greater than a thickness of each of other layers LIL1 andLIL2 other than the uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN. The uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN may partiallycover an uppermost layer LCLN of the plurality of lower interconnectionlayers LCL1, LCL2, and LCLN. Bottom surfaces of a lower gate electrodeportion LG, a lower extension line portion LE, and a lower pad portionLP may be substantially coplanar with each other.

The uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may cover the lower gate electrode portion LG andpartially extend on the lower extension line portion LE. The uppermostlayer LILN of the plurality of lower insulating layers LIL1, LIL2, andLILN may include an inclined side surface adjacent to a boundary betweena cell region CE and a connection region EX. The inclined side surfaceof the uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may have a profile similar to that of the lowerspacer 113 described with reference to FIGS. 3 to 5.

A lowermost layer UIL1 of a plurality of upper insulating layers UIL1,UIL2, and UILN may be in direct contact with the uppermost layer LILN ofthe plurality of lower insulating layers LIL1, LIL2, and LILN and theuppermost layer LCLN of the plurality of lower interconnection layersLCL1, LCL2, and LCLN. The lower extension line portion LE of theuppermost layer LCLN of the plurality of lower interconnection layersLCL1, LCL2, and LCLN may be in direct contact with the lowermost layerUIL1 of the plurality of upper insulating layers UIL1, UIL2, and UILN.

Bottom surfaces of an upper extension line portion UE and an upper padportion UP may be disposed at a lower level than a bottom surface of anupper gate electrode portion UG. A distance between the lower extensionline portions LE, a distance between the upper extension line portionsUE, and a distance between the lower extension line portion LE includedin the uppermost layer LCLN of the plurality of lower interconnectionlayers LCL1, LCL2, and LCLN and the upper extension line portion UEincluded in the lowermost layer UCL1 of the plurality of upperinterconnection layers UCL1, UCL2, and UCLN may be substantially equalto each other.

Referring to FIG. 12, a plurality of upper insulating layers UIL1A,UIL1B, UIL2, and UILN may include a first layer UIL1A and a second layerUIL1B. The first layer UIL1A and the second layer UIL1B may constitute alowermost layer of the plurality of upper insulating layers UIL1A,UIL1B, UIL2, and UILN. The first layer UIL1A may be disposed on theuppermost layer LILN of the plurality of lower insulating layers LIL1,LIL2, and LILN. The first layer UIL1A may be disposed between the lowergate electrode portion LG and the upper gate electrode portion UG. Thesecond layer UIL1B may cover the first layer UIL1A and extend to theconnection region EX. A thickness of the second layer UIL1B may besubstantially equal to the distance between the lower extension lineportions LE. The bottom surfaces of the upper extension line portion UEand the upper pad portion UP may be disposed at a lower level than thebottom surface of the upper gate electrode portion UG.

Referring to FIG. 13, the lowermost layer UIL1 of the plurality of upperinsulating layers UIL1, UIL2, and UILN may be relatively thick betweenthe lower gate electrode portion LG and the upper gate electrode portionUG and relatively thin between the lower extension line portion LE andthe upper extension line portion UE. The bottom surfaces of the upperextension line portion UE and the upper pad portion UP may be disposedat a lower level than the bottom surface of the upper gate electrodeportion UG.

Referring to FIG. 14, a first middle spacer structure 123 may bedisposed in the connection region EX between the lower stack structure50 and the upper stack structure 70. The first middle spacer structure123 may include a first dummy insulating layer 124 and a first dummyinterconnection layer 125 disposed on the first dummy insulating layer124. The first dummy interconnection layer 125 may include a dummyextension line portion DE and a dummy pad portion DP connected to thedummy extension line portion DE.

The uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may cover the cell region CE and partially extendinto the connection region EX. The first middle spacer structure 123 maybe in contact with a side surface of the uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN. A top surfaceof the uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may be substantially coplanar with top surfaces ofthe dummy extension line portion DE and the first dummy insulating layer124. A distance between respective two neighboring ones of the lowerextension line portions LE, a thickness of the dummy extension line DE,and a distance of respective two neighboring ones of the upper extensionline portions UE may be substantially equal to each other.

A distance between the lower gate electrode portion LG included in theuppermost layer LCLN of the plurality of lower interconnection layersLCL1, LCL2, and LCLN and the uppermost gate electrode UG included in thelowermost layer UCL1 of the plurality of upper interconnection layersUCL1, UCL2, and UCLN may be greater than the distance between aneighboring pair of the lower extension line portions LE. The firstdummy insulating layer 124 may be disposed between the lower extensionline portion LE included in the uppermost layer LCLN of the plurality oflower interconnection layers LCL1, LCL2, and LCLN and the dummyextension line portion DE. A thickness of the first dummy insulatinglayer 124 may be substantially equal to the distance between aneighboring pair of the lower extension line portions LE.

Referring to FIG. 15, the plurality of upper insulating layers UIL1A,UIL1B, UIL2, and UILN may include the first layer UIL1A and the secondlayer UIL1B. The first middle spacer structure 123 may be disposed inthe connection region EX between the lower stack structure 50 and theupper stack structure 70, and a second middle spacer structure 133 maybe disposed on the first middle spacer structure 123. The second middlespacer structure 133 may include a second dummy insulating layer 134 anda second dummy interconnection layer 135 disposed on the second dummyinsulating layer 134. Each of the first dummy interconnection layer 125and the second dummy interconnection layer 135 may include a dummyextension line portion DE and a dummy pad portion DP connected to thedummy extension line portion DE. A thickness of each of the first dummyinsulating layer 124 and the second dummy insulating layer 134 may besubstantially equal to the distances between a neighboring pair of thelower extension line portions LE.

FIGS. 16 to 18 and 25 to 31 are cross-sectional views taken along lineI-I′ of FIG. 2, illustrating methods of forming a semiconductor deviceaccording to an embodiment of the inventive concepts. FIGS. 19 to 24 arepartial views of a portion of FIG. 18 to explain in detail the processillustrated in FIG. 18.

Referring to FIG. 16, a source mold layer 34 and a support plate 37 maybe sequentially formed on a substrate 21 having a cell region CE and aconnection region EX. The source mold layer 34 may include a pluralityof layers described above with reference to FIG. 6. The support plate 37may cover the source mold layer 34.

Referring to FIG. 17, a lower spacer 113 may be formed on the supportplate 37. The lower spacer 113 may include a single layer or amultilayered structure.

Referring to FIG. 18, the lower spacer 113 may be partially removedusing a patterning process to expose the support plate 37 in the cellregion CE. The lower spacer 113 may remain in the connection region EX.

Referring to FIG. 19, the lower spacer 113 may include a plurality oflower spacer layers 113A, 113B, 113C, and 113D. Each of the plurality oflower spacer layers 113A, 113B, 113C, and 113D may include an insulatinglayer (e.g., silicon oxide, silicon nitride, and silicon oxynitride), asemiconductor layer (e.g., polysilicon), a conductive layer (e.g., ametal, a metal nitride, and a metal oxide), or a combination thereof. Inan example embodiment, the lower spacer 113 may include a first lowerspacer layer 113A, a second lower spacer layer 113B, a third lowerspacer layer 113C, and a fourth lower spacer layer 113D, which aresequentially stacked. A mask pattern 113M may be formed on the fourthlower spacer layer 113D. A top surface of the fourth lower spacer layer113D may be partially exposed outside the mask pattern 113M.

Referring to FIG. 20, the fourth lower spacer layer 113D may be etchedusing the mask pattern 113M as an etch mask, thereby partially exposingthe third lower spacer layer 113C.

Referring to FIG. 21, the mask pattern 113M may be partially removed topartially expose the top surface of the fourth lower spacer layer 113D.The partial removal of the mask pattern 113M may be performed using atrimming process or a pullback process.

Referring to FIG. 22, the fourth lower spacer layer 113D and the thirdlower spacer layer 113C may be etched using the mask pattern 113M as anetch mask, thereby partially exposing the third lower spacer layer 113Cand the second lower spacer layer 113B.

Referring to FIG. 23, the processes described with reference to FIGS. 20to 22 may be repeated to partially expose a top surface of the supportplate 37.

Referring to FIG. 24, the mask pattern 113M may be removed to expose thelower spacer 113. A side surface of the lower spacer 113 may have astaircase shape. In an example embodiment, the side surface of the lowerspacer 113 may have various profiles shown in FIGS. 3 to 5.

Referring to FIG. 25, a preliminary lower stack structure 50T may beformed on the substrate 21 having the lower spacer 113. The preliminarylower stack structure 50T may cover the cell region CE and theconnection region EX. The preliminary lower stack structure 50T mayinclude a plurality of lower insulating layers LIL1, LIL2, and LILN anda plurality of lower sacrificial layers 51, 52, and 5N, which arealternately stacked on each other.

The plurality of lower sacrificial layers 51, 52, and 5N may include amaterial having an etch selectivity with respect to the plurality oflower insulating layers LIL1, LIL2, and LILN. For example, the pluralityof lower insulating layers LIL1, LIL2, and LILN may include oxide, suchas silicon oxide, and the plurality of lower sacrificial layers 51, 52,and 5N may include nitride such as silicon nitride. A lowermost layerLIL1 of the preliminary lower stack structure 50T may be a lowermostlayer LIL1 of the plurality of lower insulating layers LIL1, LIL2, andLILN, and an uppermost layer LILN of the preliminary lower stackstructure 50T may be an uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN. The lowermost layer LIL1 of theplurality of lower insulating layers LIL1, LIL2, and LILN may be indirect contact with the support plate 37 in the cell region CE, and maybe in direct contact with the lower spacer 113 in the connection regionEX. The uppermost layer LILN of the plurality of lower insulating layersLIL1, LIL2, and LILN may be thicker than each of other layers LIL1 andLIL2 of the plurality of lower insulating layers LIL1, LIL2, and LILN.

Referring to FIG. 26, an uppermost layer 5N of the plurality of lowersacrificial layers 51, 52, and 5N may be exposed in the connectionregion EX using a planarization process. A plurality of lower channelholes 89H1 may be formed in the cell region CE to vertically passthrough the preliminary lower stack structure 50T, the support plate 37,and the source mold layer 34. A channel sacrificial layer 62 may beformed inside the plurality of lower channel holes 89H1. The uppermostlayer LILN of the plurality of lower insulating layers LIL1, LIL2, andLILN may remain in the cell region CE. Top surfaces of the uppermostlayer LILN of the plurality of lower insulating layers LIL1, LIL2, andLILN, the uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N, and the channel sacrificial layer 62 may beexposed on the same planar surface.

The channel sacrificial layer 62 may include a material having an etchselectivity with respect to the preliminary lower stack structure 50T,the support plate 37, the source mold layer 34, and the substrate 21.For example, the channel sacrificial layer 62 may include a metal, ametal nitride, a metal oxide, polysilicon, silicon oxide, siliconnitride, silicon oxynitride, or a combination thereof.

Referring to FIG. 27, a preliminary upper stack structure 70T may beformed on the preliminary lower stack structure 50T. The preliminaryupper stack structure 70T may cover the cell region CE and theconnection region EX. The preliminary upper stack structure 70T mayinclude a plurality of upper insulating layers UIL1, UIL2, and UILN anda plurality of upper sacrificial layers 71, 72, and 7N, which arealternately stacked on each other.

The plurality of upper sacrificial layers 71, 72, and 7N may include amaterial having an etch selectivity with respect to the plurality ofupper insulating layers UIL1, UIL2, and UILN. The plurality of upperinsulating layers UIL1, UIL2, and UILN may include the same material asthe plurality of lower insulating layers LIL1, LIL2, and LILN. Theplurality of upper sacrificial layers 71, 72, and 7N may include thesame material as the plurality of lower sacrificial layers 51, 52, and5N.

A lowermost layer UIL1 of the preliminary upper stack structure 70T maybe a lowermost layer UIL1 of the plurality of upper insulating layersUIL1, UIL2, and UILN, and an uppermost layer UILN of the preliminaryupper stack structure 70T may be an uppermost layer UILN of theplurality of upper insulating layers UIL1, UIL2, and UILN. The lowermostlayer UIL1 of the plurality of upper insulating layers UIL1, UIL2, andUILN may be in direct contact with the uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN and theuppermost layer 5N of the plurality of lower sacrificial layers 51, 52,and 5N.

In the connection region EX, each of distances between the plurality oflower sacrificial layers 51, 52, and 5N, each of distances between theplurality of upper sacrificial layers 71, 72, and 7N, and a distancebetween the uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N and a lowermost layer 71 of the plurality of uppersacrificial layers 71, 72, and 7N may be substantially equal to eachother. In the cell region CE, a distance between the uppermost layer 5Nof the plurality of lower sacrificial layers 51, 52, and 5N and thelowermost layer 71 of the plurality of upper sacrificial layers 71, 72,and 7N may be relatively greater than each of the distances between theplurality of lower sacrificial layers 51, 52, and 5N and each of thedistances between the plurality of upper sacrificial layers 71, 72, and7N.

Referring to FIG. 28, the plurality of lower insulating layers LIL1,LIL2, and LILN, the plurality of lower sacrificial layers 51, 52, and5N, the plurality of upper insulating layers UIL1, UIL2, and UILN, andthe plurality of upper sacrificial layers 71, 72, and 7N may bepartially removed to form a plurality of preliminary lower pad portionsTLP and a plurality of preliminary upper pad portions TUP. A fourthinsulating layer 41 may be formed on the plurality of preliminary lowerpad portions TLP and the plurality of preliminary upper pad portionsTUP.

The plurality of preliminary lower pad portions TLP and the plurality ofpreliminary upper pad portions TUP may be sequentially offset alignedwith each other in the connection region EX. Each of the plurality ofpreliminary lower pad portions TLP and the plurality of preliminaryupper pad portions TUP may be continuous with a side surface of acorresponding one of the plurality of lower sacrificial layers 51, 52,and 5N and the plurality of upper sacrificial layers 71, 72, and 7N. Abottom surface of each of the pad portions of preliminary lower padportions TLP and the plurality of preliminary upper pads TUP may besubstantially coplanar with a bottom surface of a corresponding one ofthe plurality of lower sacrificial layers 51, 52, and 5N and theplurality of upper sacrificial layers 71, 72, and 7N. The plurality ofpreliminary lower pad portions TLP and the plurality of preliminaryupper pad portions TUP may exhibit a staircase form.

In the connection region EX, since each of the distances between theplurality of lower sacrificial layers 51, 52, and 5N, each of thedistances between the plurality of upper sacrificial layers 71, 72, and7N, and the distance between the uppermost layer 5N of the plurality oflower sacrificial layers 51, 52, and 5N and the lowermost layer 71 ofthe plurality of upper sacrificial layers 71, 72, and 7N aresubstantially equal to each other, a process of forming the plurality ofpreliminary lower pad portions TLP and the plurality of preliminaryupper pad portions TUP may be simplified.

Referring to FIG. 29, in the cell region CE, a plurality of upperchannel holes 89H2 may be formed to pass through the preliminary upperstack structure 70T and communicate with the plurality of lower channelholes 89H1. The channel sacrificial layer 62 may be exposed at bottomsof the plurality of upper channel holes 89H2.

Referring to FIG. 30, the channel sacrificial layer 62 may be removed sothat the plurality of lower channel holes 89H1 may communicate with (orcommunicatively couple with or connected to) the plurality of upperchannel holes 89H2. A plurality of channel structures 89 may be formedinside the plurality of lower channel holes 89H1 and the plurality ofupper channel holes 89H2. Each of the plurality of channel structures 89may include an information storage pattern 85, a channel pattern 86, acore pattern 87, and a bit pad 88. The bit pad 88 may include asemiconductor layer (e.g., polysilicon). For example, the bit pad 88 mayinclude an N-type polysilicon layer. In an example embodiment, the bitpad 88 may serve as a drain region.

Referring to FIG. 31, the source mold layer 34 may be partially removedto form a replacement conductive line 35. The source mold layer 34 mayremain in the connection region EX. The replacement conductive line 35may be formed in the cell region CE. A side surface of the replacementconductive line 35 may be in direct contact with a side surface of thesource mold layer 34. The replacement conductive line 35 may passthrough the information storage pattern 85 and be in direct contact witha side surface of the channel pattern 86.

The plurality of lower sacrificial layers 51, 52, and 5N and theplurality of upper sacrificial layers 71, 72, and 7N may be removed toform a plurality of lower interconnection layers LCL1, LCL2, and LCLNand a plurality of upper interconnection layers UCL1, UCL2, and UCLN.The plurality of lower insulating layers LIL1, LIL2, and LILN and theplurality of lower interconnection layers LCL1, LCL2, and LCLN, whichare alternately stacked on each other, may constitute a lower stackstructure 50. The plurality of upper insulating layers UIL1, UIL2, andUILN and the plurality of upper interconnection layers UCL1, UCL2, UCLN,which are alternately stacked on each other, may constitute an upperstack structure 70.

Referring back to FIG. 9, a fifth insulating layer 43 may be formed onthe upper stack structure 70 and the fourth insulating layer 41. Aplurality of cell contact plugs 91 may be formed to pass through thefifth insulating layer 43 and the fourth insulating layer 41 and be incontact with the lower pad portions LP and the upper pad portions UP. Aplurality of bit plugs 93 may be formed to pass through the fifthinsulating layer 43 and be in contact with the bit pads 88. A pluralityof upper circuit interconnections 95 and a plurality of bit lines 97 maybe formed on the fifth insulating layer 43.

FIGS. 32 and 33 are cross-sectional views taken along line I-I′ of FIG.2, illustrating a method of forming a semiconductor device according toan embodiment of the inventive concepts.

Referring to FIG. 32, a source mold layer 34 and a support plate 37 maybe sequentially formed on a substrate 21. A preliminary lower stackstructure 50T may be formed on the substrate 21 having the support plate37. The preliminary lower stack structure 50T may cover the cell regionCE and the connection region EX. The preliminary lower stack structure50T may include a plurality of lower insulating layers LIL1, LIL2, andLILN and a plurality of lower sacrificial layers 51, 52, and 5N, whichare alternately stacked on each other.

A plurality of lower channel holes 89H1 may be formed in the cell regionCE to vertically pass through the preliminary lower stack structure 50T,the support plate 37, and the source mold layer 34. A channelsacrificial layer 62 may be formed inside the plurality of lower channelholes 89H1. An uppermost layer LILN of the plurality of lower insulatinglayers LIL1, LIL2, and LILN may be partially removed to expose anuppermost layer 5N of the plurality of lower sacrificial layers 51, 52,and 5N in the connection region EX. The uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN may remain inthe cell region CE. The uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN may be relatively thicker thaneach of other layers LIL1 and LIL2 of the plurality of lower insulatinglayers LIL1, LIL2, and LILN.

A process of partially removing the uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN may include aprocess the same as or substantially similar to that described withreference to FIGS. 18 to 24. The uppermost layer LILN of the pluralityof lower insulating layers LIL1, LIL2, and LILN may include inclinedside surfaces adjacent to a boundary between the cell region CE and theconnection region EX.

Referring to FIG. 33, a preliminary upper stack structure 70T may beformed on the preliminary lower stack structure 50T. The preliminaryupper stack structure 70T may include a plurality of upper insulatinglayers UIL1, UIL2, and UILN and a plurality of upper sacrificial layers71, 72, and 7N, which are alternately stacked on each other. A lowermostlayer UIL1 of the plurality of upper insulating layers UIL1, UIL2, andUILN may be in direct contact with the uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN and theuppermost layer 5N of the plurality of lower sacrificial layers 51, 52,and 5N.

The plurality of lower insulating layers LIL1, LIL2, and LILN, theplurality of lower sacrificial layers 51, 52, and 5N, the plurality ofupper insulating layers UIL1, UIL2, and UILN, and the plurality of uppersacrificial layers 71, 72, and 7N may be partially removed to form aplurality of preliminary lower pad portions TLP and a plurality ofpreliminary upper pad portions TUP. A fourth insulating layer 41 may beformed on the plurality of preliminary lower pad portions TLP and theplurality of preliminary upper pad portions TUP.

In the connection region EX, each of distances between the plurality oflower sacrificial layers 51, 52, and 5N, each of distances between theplurality of upper sacrificial layers 71, 72, and 7N, and a distancebetween the uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N and the lowermost layer 71 of the plurality ofupper sacrificial layers 71, 72, and 7N may be substantially equal toeach other. In the cell region CE, the distance between the uppermostlayer 5N of the plurality of lower sacrificial layers 51, 52, and 5N andthe lowermost layer 71 of the plurality of upper sacrificial layers 71,72, and 7N may be relatively greater than each of the distances betweenthe plurality of lower sacrificial layers 51, 52, and 5N and each of thedistances between the plurality of upper sacrificial layers 71, 72, and7N.

Referring back to FIG. 11, a plurality of upper channel holes 89H2 maybe formed to communicate with the plurality of lower channel holes 89H1.The channel sacrificial layer 62 may be removed so that the plurality oflower channel holes 89H1 may communicate with the plurality of upperchannel holes 89H2. A plurality of channel structures 89 may be formedinside the plurality of lower channel holes 89H1 and the plurality ofupper channel holes 89H2.

The source mold layer 34 may be partially removed to form a replacementconductive line 35. The plurality of lower sacrificial layers 51, 52,and 5N and the plurality of upper sacrificial layers 71, 72, and 7N maybe removed to form a plurality of lower interconnection layers LCL1,LCL2, and LCLN and a plurality of upper interconnection layers UCL1,UCL2, and UCLN.

FIGS. 34 to 37 are cross-sectional views taken along line I-I′ of FIG.2, illustrating a method of forming a semiconductor device according toan embodiment of the inventive concepts.

Referring to FIG. 34, a source mold layer 34, a support plate 37, apreliminary lower stack structure 50T, a plurality of lower channelholes 89H1, a channel sacrificial layer 62, and a lower spacer 113 maybe formed on a substrate 21. The preliminary lower stack structure 50Tmay include a plurality of lower insulating layers LIL1, LIL2, and LILNand a plurality of lower sacrificial layers 51, 52, and 5N, which arealternately stacked on each other. A first upper insulating layer UIL1may be formed on an uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN and an uppermost layer 5N of theplurality of lower sacrificial layers 51, 52, and 5N. A thickness of thefirst upper insulating layer UIL1 may be relatively greater than athickness of each of the plurality of lower insulating layers LIL1,LIL2, and LILN excluding the uppermost layer LILN.

Referring to FIG. 35, the first upper insulating layer UIL1 may bepartially recessed to reduce a thickness of the first upper insulatinglayer UIL1 in the connection region EX. In the connection region EX, thethickness of the first upper insulating layer UIL1 may be substantiallyequal to the thickness of each of the plurality of lower insulatinglayers LIL1, LIL2, and LILN excluding the uppermost layer LILN.

Referring to FIG. 36, a plurality of other upper insulating layers UIL2and UILN and a plurality of upper sacrificial layers 71, 72, and 7N maybe alternately stacked on each other on the first upper insulating layerUIL1. The first upper insulating layer UIL1 and the plurality of otherupper insulating layers UIL2 and UILN may constitute a plurality ofupper insulating layers UIL1, UIL2, and UILN. The first upper insulatinglayer UIL1 may correspond to a lowermost layer UIL1 of the plurality ofupper insulating layers UIL1, UIL2, and UILN. The plurality of upperinsulating layers UIL1, UIL2, and UILN and the plurality of uppersacrificial layers 71, 72, and 7N may constitute a preliminary upperstack structure 70T.

In the connection region EX, each of distances between the plurality oflower sacrificial layers 51, 52, and 5N, each of distances between theplurality of upper sacrificial layers 71, 72, and 7N, and a distancebetween the uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N and the lowermost layer 71 of the plurality ofupper sacrificial layers 71, 72, and 7N may be substantially equal toeach other. In the cell region CE, the distance between the uppermostlayer 5N of the plurality of lower sacrificial layers 51, 52, and 5N andthe lowermost layer 71 of the plurality of upper sacrificial layers 71,72, and 7N may be relatively greater than each of the distances betweenthe plurality of lower sacrificial layers 51, 52, and 5N and each of thedistances between the plurality of upper sacrificial layers 71, 72, and7N.

Referring to FIG. 37, the plurality of lower insulating layers LIL1,LIL2, and LILN, the plurality of lower sacrificial layers 51, 52, and5N, the plurality of upper insulating layers UIL1, UIL2, and UILN, andthe plurality of upper sacrificial layers 71, 72, and 7N may bepartially removed to form a plurality of preliminary lower pad portionsTLP and a plurality of preliminary upper pad portions TUP. A fourthinsulating layer 41 may be formed on the plurality of preliminary lowerpad portions TLP and the plurality of preliminary upper pad portionsTUP.

Referring back to FIG. 13, a plurality of upper channel holes 89H2 maybe formed to communicate with the plurality of lower channel holes 89H1.A plurality of channel structures 89 may be formed inside the pluralityof lower channel holes 89H1 and the plurality of upper channel holes89H2. The source mold layer 34 may be partially removed to form areplacement conductive line 35. The plurality of lower sacrificiallayers 51, 52, and 5N and the plurality of upper sacrificial layers 71,72, and 7N may be removed to form a plurality of lower interconnectionlayers LCL1, LCL2, and LCLN and a plurality of upper interconnectionlayers UCL1, UCL2, and UCLN.

FIGS. 38 to 42 are cross-sectional views taken along line I-I′ of FIG.2, illustrating a method of forming a semiconductor device according toan embodiment of the inventive concepts.

Referring to FIG. 38, a source mold layer 34, a support plate 37, and apreliminary lower stack structure 50T may be formed on a substrate 21.The preliminary lower stack structure 50T may include a plurality oflower insulating layers LIL1, LIL2, and LILN and a plurality of lowersacrificial layers 51, 52, and 5N, which are alternately stacked on eachother. A thickness of an uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN may be relatively greater than athickness of each of other layers LIL1 and LIL2 of the plurality oflower insulating layers LIL1, LIL2, and LILN.

Referring to FIG. 39, the uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN may be partially removed toexpose an uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N in the connection region EX. The uppermost layerLILN of the plurality of lower insulating layers LIL1, LIL2, and LILNmay remain in the cell region CE.

Referring to FIG. 40, a preliminary middle spacer structure 123T may beformed on an uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N in the connection region EX. The preliminarymiddle spacer structure 123T may include a first dummy insulating layer124 and a first dummy sacrificial layer 125T disposed on the first dummyinsulating layer 124. The formation of the preliminary middle spacerstructure 123T may include performing a plurality of thin-film formingprocesses and a planarization process. The planarization process mayinclude a chemical mechanical polishing (CMP) process, an etchbackprocess, or a combination thereof. Top surfaces of the uppermost layerLILN of the plurality of lower insulating layers LIL1, LIL2, and LILN,the first dummy insulating layer 124, and the first dummy sacrificiallayer 125T may be exposed on substantially the same planar surface.

In the connection region EX, a thickness of the first dummy insulatinglayer 124 may be substantially equal to a thickness of each of otherlayers LIL1 and LIL2 other than the uppermost layer LILN of theplurality of lower insulating layers LIL1, LIL2, and LILN. A thicknessof the first dummy sacrificial layer 125T may be substantially equal toa thickness of each of the plurality of lower sacrificial layers 51, 52,and 5N.

Referring to FIG. 41, a plurality of lower channel holes 89H1 and achannel sacrificial layer 62 may be formed.

Referring to FIG. 42, a preliminary upper stack structure 70T may beformed on the preliminary lower stack structure 50T and the preliminarymiddle spacer structure 123T. The preliminary upper stack structure 70Tmay include a plurality of upper insulating layers UIL1, UIL2, and UILNand a plurality of upper sacrificial layers 71, 72, and 7N, which arealternately stacked on each other. A lowermost layer UIL1 of theplurality of upper insulating layers UIL1, UIL2, and UILN may be indirect contact with the uppermost layer LILN of the plurality of lowerinsulating layers LIL1, LIL2, and LILN and the first dummy sacrificiallayer 125T.

The plurality of lower insulating layers LIL1, LIL2, and LILN, theplurality of lower sacrificial layers 51, 52, and 5N, the first dummyinsulating layer 124, the first dummy sacrificial layer 125T, theplurality of upper insulating layers UIL1, UIL2, and UILN, and theplurality of upper sacrificial layers 71, 72, and 7N may be partiallyremoved to form a plurality of preliminary lower pad portions TLP, apreliminary dummy pad portion TDP, and a plurality of preliminary upperpad portions TUP. A fourth insulating layer 41 may be formed on theplurality of preliminary lower pad portions TLP, the preliminary dummypad portion TDP, and the plurality of preliminary upper pad portionsTUP.

In the connection region EX, each of distances between the plurality oflower sacrificial layers 51, 52, and 5N, each of distances between theplurality of upper sacrificial layers 71, 72, and 7N, a distance betweenthe uppermost layer 5N of the plurality of lower sacrificial layers 51,52, and 5N and the first dummy sacrificial layer 125T, and a distancebetween a lowermost layer 71 of the plurality of upper sacrificiallayers 71, 72, and 7N and the first dummy sacrificial layer 125T may besubstantially equal to each other. In the cell region CE, a distancebetween the uppermost layer 5N of the plurality of lower sacrificiallayers 51, 52, and 5N and the lowermost layer 71 of the plurality ofupper sacrificial layers 71, 72, and 7N may be relatively greater thaneach of the distances between the plurality of lower sacrificial layers51, 52, and 5N and each of the distances between the plurality of uppersacrificial layers 71, 72, and 7N.

Referring back to FIG. 14, a plurality of upper channel holes 89H2 maybe formed to communicate with the plurality of lower channel holes 89H1.A plurality of channel structures 89 may be formed inside the pluralityof lower channel holes 89H1 and the plurality of upper channel holes89H2. The source mold layer 34 may be partially removed to form areplacement conductive line 35. The plurality of lower sacrificiallayers 51, 52, and 5N, the first dummy sacrificial layer 125T, and theplurality of upper sacrificial layers 71, 72, and 7N may be removed toform a plurality of lower interconnection layers LCL1, LCL2, and LCLN, afirst dummy interconnection layer 125, and a plurality of upperinterconnection layers UCL1, UCL2, and UCLN. The first dummy insulatinglayer 124 and the first dummy interconnection layer 125 may constitute afirst middle spacer structure 123.

According to the disclosed example embodiments of the inventiveconcepts, an upper stack structure can be provided on a lower stackstructure. A distance between an uppermost gate electrode of the lowerstack structure and a lowermost gate electrode of the upper stackstructure may be greater than each of distances between respective twoneighboring ones of a plurality of extension lines. A process of formingpad portions connected to the plurality of extension line portions canbe simplified. Thus, a semiconductor device having a relatively highintegration density and/or improved electrical characteristics can beimplemented.

While some example embodiments of the inventive concepts have beendescribed with reference to the accompanying drawings, it should beunderstood by those skilled in the art that various modifications may bemade without departing from the scope of the inventive concepts andwithout changing essential features thereof. Therefore, theabove-described example embodiments should be considered in adescriptive sense only and not for purposes of limitation.

What is claimed is:
 1. A semiconductor device comprising: a substratehaving a cell region and a connection region adjacent to the cellregion; a lower stack structure including a plurality of lowerinsulating layers and a plurality of lower conductive layers, theplurality of lower insulating layers and the plurality of lowerconductive layers being alternately stacked on each other on thesubstrate, each of the plurality of lower conductive layers including, alower gate electrode portion in the cell region, and a lower extensionline portion in the connection region, the lower extension line portionextending from the lower gate electrode portion; an upper stackstructure including a plurality of upper insulating layers and aplurality of upper conductive layers, the plurality of upper insulatinglayers and the plurality of upper conductive layers being alternatelystacked on each other on the lower stack structure, each of theplurality of upper conductive layers including, an upper gate electrodeportion in the cell region, and an upper extension line portion in theconnection region, the upper extension line portion extending from theupper gate electrode portion, a first distance between an uppermostsurface of the lower gate electrode portion and a lowermost surface ofthe upper gate electrode portion being greater than a second distancebetween an uppermost surface of the lower extension line portion and alowermost surface of the upper extension line portion, and a thirddistance between the substrate and a lowermost surface of the lower gateelectrode portion being less than a fourth distance between thesubstrate and a lowermost surface of the lower extension line portion;and a channel structure passing through the upper stack structure andthe lower stack structure.
 2. The semiconductor device of claim 1,wherein the second distance, a fifth distance between lower extensionline portions of two neighboring ones of the plurality of lowerconductive layers, and a sixth distance between upper extension lineportions of two neighboring ones of the plurality of upper conductivelayers are substantially equal to each other.
 3. The semiconductordevice of claim 1, wherein a seventh distance between upper gateelectrode portions of two neighboring ones of the plurality of upperconductive layers is substantially equal to an eighth distance betweenlower gate electrode portions of two neighboring ones of the pluralityof lower conductive layers, and the first distance is greater than theeighth distance.
 4. The semiconductor device of claim 1, wherein thelower extension line portion included in an uppermost one of theplurality of lower conductive layers is in direct contact with alowermost one of the plurality of upper insulating layers.
 5. Thesemiconductor device of claim 1, wherein a bottom surface of the upperextension line portion is lower than a bottom surface of the upper gateelectrode portion, the bottom surface of the upper gate electrodeportion connected to the upper extension line portion.
 6. Thesemiconductor device of claim 1, wherein an uppermost one of theplurality of lower insulating layers is between the lower gate electrodeportion of the uppermost one of the plurality of lower conductive layersand the upper gate electrode portion of the lowermost one of theplurality of upper conductive layers, and the uppermost one of theplurality of lower insulating layers has a thickness greater than afifth distance between lower extension line portions between twoneighboring ones of the plurality of lower conductive layers.
 7. Thesemiconductor device of claim 1, wherein a lowermost one of theplurality of upper insulating layers comprises: a first portion betweenthe lower gate electrode portion of the uppermost one of the pluralityof lower conductive layers and the upper gate electrode portion of thelowermost one of the plurality of upper conductive layers; and a secondportion including a first sub-portion and a second sub-portion, thefirst sub-portion on the first portion, and the second sub-portionconnected to the first sub-portion and extending into the connectionregion, the first portion not being under the second sub-portion.
 8. Thesemiconductor device of claim 7, wherein a thickness of the secondportion is substantially equal to a distance between lower extensionline portions of two neighboring ones of the plurality of lowerconductive layers.
 9. The semiconductor device of claim 1, furthercomprising: a lower spacer in the connection region, the lower spacerbeing between the lower stack structure and the substrate.
 10. Thesemiconductor device of claim 9, wherein the lower spacer has aninclined side surface, which is adjacent to a boundary between the cellregion and the connection region.
 11. The semiconductor device of claim10, wherein a straight line passing through an upper end and a lower endof the inclined side surface of the lower spacer forms an inclinationangle of 60° or less with respect to a horizontal line in parallel witha surface of the substrate.
 12. The semiconductor device of claim 9,wherein the lower extension line portion includes a sub-portionvertically overlapping the lower spacer, and a bottom surface of thelower extension line portion is higher than a bottom surface of thelower gate electrode portion that is connected to the lower extensionline portion.
 13. The semiconductor device of claim 12, wherein a bottomsurface of the upper extension line portion is lower than a bottomsurface of the upper gate electrode portion that is connected to theupper extension line portion.
 14. The semiconductor device of claim 12,wherein a top surface of the lower extension line portion included inthe uppermost one of the plurality of lower conductive layers issubstantially coplanar with a top surface of an uppermost one of theplurality of lower insulating layers.
 15. A semiconductor devicecomprising: a substrate having a cell region and a connection regionadjacent to the cell region; a lower stack structure including aplurality of lower insulating layers and a plurality of lowerinterconnection layers alternately stacked on each other on thesubstrate, each of the plurality of lower interconnection layersincluding, a lower electrode portion in the cell region, and a lowerextension line portion in the connection region, the lower extensionline portion extending from the lower electrode portion; an upper stackstructure including a plurality of upper insulating layers and aplurality of upper interconnection layers alternately stacked on eachother on the lower stack structure, each of the plurality of upperinterconnection layers including, an upper electrode portion in the cellregion, and an upper extension line portion in the connection region,the upper extension line portion extending from the upper electrodeportion; and a channel structure passing through the upper stackstructure and the lower stack structure, wherein at least one of thelower extension line portion of an uppermost one of the plurality oflower interconnection layers or the upper extension line portion of anlowermost one of the plurality of upper interconnection layers include afirst inclined region near the cell region.
 16. The semiconductor deviceof claim 15, wherein when the upper extension line portion of thelowermost one of the plurality of upper interconnection layers includesthe first inclined region, a lowermost one of the plurality of upperinsulating layers includes a second inclined region that is under andcorresponds to the first inclined region, and the first inclined regionand the second inclined region have a same inclination angle.
 17. Thesemiconductor device of claim 16, wherein the first inclined region andthe second inclined region is inclined downward in a direction from thecell region to the connection region.
 18. The semiconductor device ofclaim 15, wherein when the lower extension line portion of the uppermostone of the plurality of lower interconnection layers includes the firstinclined region, an uppermost one of the plurality of lower insulatinglayers includes a second inclined region that is above and correspondsto the first inclined region, and the first inclined region and thesecond inclined region have a same inclination angle.
 19. Thesemiconductor device of claim 18, wherein the first inclined region andthe second inclined region is inclined upward in a direction from thecell region to the connection region.
 20. The semiconductor device ofclaim 15, wherein the lower extension line portion of the uppermost oneof the plurality of lower interconnection layers includes the firstinclined region near the cell region, which is inclined upward in adirection from the cell region to the connection region, and the upperextension line portion of the lowermost one of the plurality of upperinterconnection layers includes the first inclined region near the cellregion, which is inclined downward in the direction from the cell regionto the connection region.